Dielectric Characterization of SiO2-PMMA Organic – Inorganic Hybrid Thin Films
Abstract
For the research presented in this paper, hybrid organic-inorganic materials were prepared using a modified sol-gel reaction.
Hybrid organic-inorganic compounds were synthesized in ethanol using methylmethacrylate (MMA), SiO2 nanoparticles, and 3-trimetoxi-silil-propilmethacrylate (TMSPM) as coupling agent. For the deposition of thin films, the spincoating method was used.
The electrical measurements of dielectric thin films were done using a metalinsulator-metal (MIM) devices fabricated to study the dielectric constant of the films as function of frequency (measured at 1 MHz). Electrical results show a weak trend of the dielectric constant of the hybrid films with different MMA molar ratio. More importantly, the PMMA-SiO2 hybrid films showed a higher dielectric constant than SiO2 and PMMA layers, due to the presence of additional C-O-C bond. For the calculation of dielectric permittivity, the thickness of thin films was measured using cross-section SEM micrographs and the value of dielectric permittivity was calculated using electrical capacitance formula.
References
[2]. Sangwan V. K., Ortiz R. P., Alonso J. M. P., Emery J. D., Bedzyk M. J., Lauhon L. J., Marks T. J., Hersam M. C., ACS Nano, 6 (8), p. 7480-7488, 2012.
[3]. Gyeong-Su P., Young B. K., Seong Y. P., Xiang S. L., Sung H., Myoung-Jae L., Man C., Nature Communications, 4, 2013.
[4]. Almaral-Sanchez J. L., Rubio E., Mendoza-Galvan A., Ramirez-Bon R., Red colored transparent PMMA-SiO2 hybrid films, J Phys Chem Solids, 66, p. 1660-1667, 2005.
[5]. Alvarado-Rivera J., Munoz-Saldana J., Castro-Beltran A., Quintero-Armenta J. M., Almaral-Sanchez J. L., Ramirez-Bon R., Hardness and wearing properties of SiO2-PMMA hybrid coatings reinforced with Al2O3 nanowhiskers, Phys Stat Sol, 11, p. 4254-4259, 2007.
[6]. Chia-Hua Lee, Wen-Chang Chen, Synthesis and Optical Characteristics of Trialkoxycapped Poly(methyl methacrylate)-Silica Hybrid Films, Tamkang Journal of Science and Engineering, vol. 6, no. 2, p. 73-80, 2003.
[7]. Morales-Acosta M. D., Ma Quevedo-Lopez, Rafael Ramírez-Bon, PMMA-SiO2 hybrid films as gate dielectric for ZnO based thin-film transistors, Materials Chemistry and Physics, 146, (3), p. 380-388.
[8]. Morales-Acosta M. D., Alvarado-Beltrán C. G., QuevedoLópez M. A., Gnade B. E., Mendoza-Galván A., Ramírez-Bon R., Adjustable structural, optical and dielectric characteristics in sol-gel PMMA-SiO2 hybrid films, Journal of Non-Crystalline Solids, volume 362, p. 124-135, 15 February 2013.
