Transparent and Conducting Tin Oxide Thin Films Deposited by Spray Pyrolysis
Abstract
The chemical spray pyrolysis technique has been one of the major techniques to deposit a wide variety of materials in thin film form, for different applications. The most important control parameters for obtaining good quality thin film are the nature and temperature of the substrate, the composition of the precursor solution, the gas and solution flow rates and the deposition time.
The paper presents the morphology, the electrical and optical properties of tin oxide (SnO2) thin films deposited by spray pyrolysis technique onto glass substrates at 400 oC using SnCl2 as precursor and methanol as solvent. The change in the grain shapes and orientation is presented based on SEM data. The minimum sheet resistance of 21.4 Ω/sqr was obtained, being the lowest value reported in the literature for these materials. Optical transmittance in the range of 58-85 % has been obtained for the prepared films.
References
[2]. J. Wang, B. Xu, Z. Shen, X. Ni, J. Lu - Applied Surface Science 254 (2008) 7178.
[3]. J. Ouerfelli - Materials Chemistry and Physics 112 (2008) 198.
[4]. K. K. Purushothaman - Surface Review and Letters 14 (2007) 1149.
[5]. A.E. Rakhshani - J. Appl. Phys. 81 (1997) 7988.
[6]. A.E. Rakhshani, Y. Makdisi, H. A. Ramazaniyan - J. Appl. Phys. 83 (1997) 1049.
[7]. D.R. Lide (Ed.) - Handbook of Chemistry and Physics, CRC Press, London (1993) p. 4-136.
[8]. T.J. Coutts, D.L. Young, X. Li - MRS Bull. 25 (2000) 58.
[9]. R.R Kasar., N.G. Deshpande, Y.G. Gudage, J.C. Vyas - Ramphal Sharma - Physica B: Physics of Condensed Matter, 403 (2008) 3724.
[10]. C.D. Canestraro - Applied Surface Science 255 (2008) 1874.
[11]. D. Perednis, L.J. Gauckler - Journal of Electroceramics 14 (2005) 103.
[12]. S Chacko, Ninan Sajeeth Philip, and V. K. Vaidyan - Phys. stat. sol. (a) 204, No. 10, 3305-3315 (2007).
[13]. K. S. Shamala and L. C. S. Murthy - Surface Review and Letters, Vol. 13, No. 4 (2006) 357-364.
